Scanning Probes

Scanning Probes Facility

Keysight Technologies Nanoindenter G 200

  • Continuous stiffness mode
  • XP and DCM-1 heads
  • Nanovision stage (AFM imaging with indenter)
  • High temperature cell (up to 250°C)
  • Optical microscope
  • Lateral force sensors
  • Maximum load 200 mN
  • Load resolution 50 nN
  • Depth resolution <0.01 nm
  • Positioning accuracy 1 µm (with nanovision stage 2 nm)

VISITEC Large Chamber SEM

  • Warm field emission gun
  • Two SE detectors, quadrant BSE detector, EBSD, EDX, Everhart-Thornley detector
  • Integrated servo-hydraulic testing machine with maximum testing force of 100 kN
  • Heating equipment for mechanical testing up to 350 °C
  • Chamber size 2 m³
  • Samples up to 700 mm in diameter, 600 mm in height and 300 kg
  • 5 axes positioning system for electro-optical components and detectors